System Development
Fig. 1: Microprocessing station ELPECmult
An efficient use of innovative beam sources and manufacturing processes requires new concepts of highly specialized systems. The LZH not only develops laser-assisted processes, but also integrates them into customized and practice-oriented prototype systems.
The LZH has shown a high level of competence in the field of system and component development for a multitude of systems, not only for internal but also for external applications. This includes experience that ranges from standardized marking systems to complex and highly automated processing systems.
Fig. 2: Microprocessing station ELPECVUV
The systems know-how can best be reflected by the microprocessing stations of the ELPEC series, which have proved to be highly functional and reliable in daily practice, over years. All ELPEC systems have workpiece positioning, flexible beam shaping, and laser triggering integrated into one control unit. Various peripheral systems such as online or offline monitoring, process gas control, and workpiece temperature control can be used for high precision processing applications in the submicrometer range. The different ELPEC models have been optimized to be used for different applications using different beam sources. While ELPECmult (Fig. 1) supports hybrid manufacturing technologies with a combination of several laser types and optical systems, ELPECVUV (Fig. 2) is designed to be used for wavelengths below λ = 200 nm, having a vacuum beam path without mirrors.
One example for the highly functional and reliable systems used in daily industrial practice is the first fully automated laser-assisted ampoule filling and sealing machine worldwide.
The LZH develops not only complete systems but also components or modules for existing systems.
